Abstract: Electrostatic levitation position control system is the core technology of electrostatic levitation material processing apparatus. In order to solve this problem, the basic conditions of stable levitation are analyzed. Three-dimensional position of the sample is measured by using two orthogonal parallel light beams with different wavelengths as light sources, and Position Sensitive Detectors (PSD) as position signal receiver. The Proportion Integration Differentiation (PID) position feedback control system is set up by using position signal as input and analog voltage as output. The output of the PID feedback control system drives the voltage amplifier to control the strength of the electric field according to position change of the sample. By choosing proper parameters of PID, the sample is well stabilized in the electrostatic levitation system.